A Complete Solution for Semiconductor Recipe Management

The RMS is a robust, stand-alone accelerator application built on the .Net framework. Its architecture ensures flexibility and modern performance.

• Technology Stack:The application features a rich graphical user interface (GUI) designed with WPF, C#, and the MVVM (Model-View-ViewModel) architecture.
• Database Integration:It uses the Entity Framework to connect seamlessly with SQL Server, storing all data in a single, secure relational database.
• System Connectivity:RMS is designed for a distributed environment where it can run on a central control system or an external system, retrieving recipe data from a central RDBMS that also communicates with the equipment.

Key Features & Benefits

Enhanced Efficiency and Usability

The RMS solution is engineered to be powerful yet simple to handle, directly boosting operational efficiency.

• Cost-Effective:The RMS is a cost-effective solution with no additional licensing fees apart from base framework cost and customization cost.
• Accessibility:As a distributed system, it provides flexible recipe management from both on-site clean-rooms and external office desks.
• Fast and Simple:The system simplifies and accelerates the creation and modification of even complex recipes.
• Configurable:Users can easily import master data from an Excel file with a single click, with the flexibility to extend this capability to other file formats.

Powerful and Flexible Recipe Authoring

RMS is loaded with numerous functionalities to meet modern equipment requirements.

• Recipe Creation & Modification:Create an unlimited number of recipes and open existing ones in either read-only or read-write mode for easy modification. You can also designate recipes as "Golden," which protects them from deletion without proper permission, safeguarding intellectual property.
• Advanced Step Management:The system supports adding, inserting, or deleting steps. You can replicate previous steps to save time, and a multi-step copy, paste, and insert feature further streamlines the creation process.
• Dynamic Recipes:
  • Loops:Use loops and nested loops to repeat recipe instructions without duplicating steps.
  • Variables:Implement recipe variables with defined min/max/default values.
  • Formulas:Hide sensitive data from operators by using formulas within a recipe.

Robust Data Integrity and Security

The system includes built-in checks and flexible saving options to ensure recipe data is secure and valid.

• Recipe Validation:RMS can validate recipes against pre-compiled, customer-provided rules. It supports both intra-step and inter-step validation norms to ensure a recipe is valid for execution on the equipment.
• Flexible Saving:A unique intermediate saving option allows users to save incomplete recipes and finish them later without losing information. You can also save an invalid recipe with a special flag, preventing it from being used on equipment until it's corrected and validated.

Future-Ready Platform

RMS is built with scalability in mind. The solution can be continuously enhanced with new features and customized implementations based on evolving end-user requirements. Its modular architecture ensures easy integration with future semiconductor systems and standards