A Solution for Equipment Automation

The CTC Framework features a modular architecture that separates the main control logic from the user interface, data acquisition, and equipment hardware layers. This design ensures stability and simplifies development and maintenance. The system is composed of several key computers and networks:

• Cluster Tool Controller: The core of the solution, hosting the Cluster Tool Controller and key operational modules like the logger and health monitor.
• Visualization Interface: Runs the user-facing applications, including the CTCF User Interface, Recipe Editor, and Data Analyzer.
• EDA Server: Manages the Equipment Data Acquisition (EDA) interface for communication with the factory host.
• Internal & External Networks: The architecture uses separate networks to manage communication between internal tool components (like PLCs and process modules) and external systems (like the SEMI SECS/GEM Host).

Key Features & Solution Benefits

Comprehensive Equipment Control

The framework provides end-to-end management of all tool operations, from wafer transport to process execution.

• Job & Schedule Management: The Scheduler uses a dynamic route discovery algorithm to coordinate wafer jobs, while the Job Manager oversees the creation and execution of Control Jobs and Process Jobs.
• Material Tracking: The Material Tracking Manager is responsible for tracking wafer movement and status (e.g., processed, unprocessed) throughout the tool.
• Hardware Control: The Transfer Module Controller directly manages the equipment's handler module, EFEM, load locks, and other transport components.

Seamless Factory Integration

The CTC Framework is built for seamless integration into modern semiconductor fabs.

• SEMI Standards Compliance: The solution has built-in support for SECS/GEM, GEM300, and EDA Freeze II standards. It adheres to a wide range of SEMI standards, including E94 (Control Job Management), E90 (Substrate Tracking), E87 (Carrier Management), and E40 (Processing Management).
• EDA Server: A dedicated EDA server provides the SEMI "EDA Freeze II" communication interface, which can be deployed on the same computer as the CTCF or on a separate machine for flexibility.

Advanced Diagnostics and Monitoring

The solution includes a powerful suite of tools for monitoring, logging, and analysis.

• System Health Monitoring: The Health Monitor constantly tracks computer resource utilization like CPU load, memory usage, and disk space, raising alarms if predefined thresholds are exceeded.
• Comprehensive Logging: The Activity Logger records all module activities with timestamps for future diagnosis and traceability, while the Data Logger stores process and equipment data in a central database.
• Data Analysis: A Data Analyzer application provides graphical representations of logged data, enabling detailed analysis of the tool's performance.

User-Centric Operations

The framework is designed with the operator and engineer in mind, providing intuitive and powerful interfaces.

• Intuitive GUI: The CTCF User Interface provides all the screens and views for equipment operation, designed in compliance with the SEMI E95 standard.
• Recipe Management: A spreadsheet-like Recipe Editor allows for easy creation and modification of recipes in both online and offline modes.
• Configuration Control: The Configuration Manager is a stand-alone tool that allows authorized users to add, edit, or compare equipment configurations based on their assigned roles and privileges.
• User Security: A User Manager module defines user roles, security settings, and access rights for all system functions.

Hardware & Protocol Flexibility

The framework is designed to integrate with a wide variety of common hardware and communication protocols.

• I/O Providers: It supports communication with DeviceNet devices, PLCs using modbus, and EtherCat (Beckhoff ADS).
• Supported Subsystems: The solution has proven support for a range of devices, including:

• Loadports from Sinfonia, Brooks, and TDK.
• EFEM from Brooks.
• Vacuum Robots from Brooks and Persimmon.
• Mass Flow Controllers and Pressure Controllers from various vendors.

Deployment & Technology Stack

• Operating System: Windows 10 or higher
• .NET Framework: Version 4.7+
• Database: PostgreSQL 12+
• Development Environment: Visual Studio 2019/2022 Professional
• Hardware Requirements: Intel i5 (2GHz), 8GB RAM, 250GB HDD

Mindteck's Cluster Tool Controller Framework (CTCF) is a comprehensive, configurable, and SEMI-compliant solution for semiconductor equipment. It empowers OEMs & Fabs to:

• Reduce development/integration costs
• Ensure compliance and interoperability
• Simplify troubleshooting and maintenance
• Enhance operational efficiency

This framework serves as a future-ready solution to support evolving fab automation needs, ensuring long-term reliability, flexibility, and cost savings.